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PART 1 ¹ÝµµÃ¼ ¼ÒÀÚ
Chapter 1 ¿¡³ÊÁö ¹êµå¿Í ¹ÝµµÃ¼ ¼ÒÀç
Chapter 2 PN Á¢ÇÕ(Junction)
Chapter 3 MOSFET
Chapter 4 MOSFETÀÇ ¹Ì¼¼È¿Í Short Channel Effect
Chapter 5 MOSFET ¿ä¼Ò ±â¼ú
Chapter 6 DRAM
Chapter 7 NAND Flash
Chapter 8 ¸Þ¸ð¸® ºñ±³¿Í Â÷¼¼´ë ¸Þ¸ð¸®
PART 2 ¹ÝµµÃ¼ °øÁ¤
Chapter 1 °øÁ¤ ±âÃÊ
Chapter 2 ÇöóÁ ±âÃÊ
Chapter 3 Æ÷Åä °øÁ¤(Photolithography)
Chapter 4 ½Ä°¢ °øÁ¤(Etch)
Chapter 5 ¹Ú¸· °øÁ¤(Thin film)
Chapter 6 ±Ý¼Ó ¹è¼± °øÁ¤(Metallization)
Chapter 7 »êÈ °øÁ¤(Oxidation)
Chapter 8 ÀÌ¿ÂÁÖÀÔ °øÁ¤(Ion Implantation)
Chapter 9 CMP °øÁ¤(CMP, Chemical-Mechanical Polishing)
Chapter 10 ¼¼Á¤ °øÁ¤(Cleaning)
PART 3 ¹ÝµµÃ¼ Å×½ºÆ® ¹× ÆÐŰ¡ °øÁ¤
Chapter 1 ¹ÝµµÃ¼ Å×½ºÆ® °øÁ¤
Chapter 2 ¹ÝµµÃ¼ ÆÐŰ¡ °øÁ¤
PART 4 ¹ÝµµÃ¼ Àåºñ
Chapter 1 ¾îÇöóÀÌµå ¸ÓƼ¾î¸®¾óÁî
Chapter 2 ASML
Chapter 3 TEL(µµÄìÀÏ·ºÆ®·Ð)
Chapter 4 ·¥¸®¼Ä¡
Chapter 5 ¼¼¸Þ½º
Chapter 6 ¿øÀÍIPS